Plasma optical emission studies of high-Tc superconducting and buffer thin film physical vapour deposition

Vacuum

Volumn 48, Issue 10, 1997, Pages 803-816

  Tsaneva, V ^a   Donchev, T ^a   Tomov, R ^a   Ouzounov, D ^a   Veneva, A ^a   Nurgaliev, T ^a  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); EMISSION SPECTROSCOPY; HIGH TEMPERATURE SUPERCONDUCTORS; LASER ABLATION; MAGNETRON SPUTTERING; PLASMA APPLICATIONS; PULSED LASER APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SUPERCONDUCTING FILMS; SURFACE TREATMENT; THIN FILMS;

BUFFER FILMS; PHYSICAL VAPOR DEPOSITION; PLASMA OPTICAL EMISSION SPECTROSCOPY;

VAPOR DEPOSITION;

EID: 0031250504     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(97)00027-4     Document Type: Article

References (64)

1. Athavale, S., Auciello, O., Bourham, M., Hankins, O.E., Gras-Marti, A., Moreno-Marin, J.C. and Valles-Abarca, J.A., Vacuum, 1990, 41, 867.
2. Auciello, O., Athavale, S., Hankins, O.E., Sito, M., Schrener, A.F. and Biunno, N., Appl. Phys. Lett., 1988, 53, 72.
3. Blair, A.J., Metzger, G. and Fleddermann, C.B., J. Appl. Phys., 1992, 72, 4792.
4. Dyer, P.E., Greenough, R.D. and Issa, A., Key, P.H., Appl. Phys. Lett., 1988, 53, 534.
5. Fleddermann, C.B., J. Appl. Phys., 1989, 65, 2861.
6. Fournier, J., Fournier, P.G., Kaddouri, A. and Dunet, H., J. Appl. Phys., 1991, 69, 2382.
7. Geyer, T.J. and Weimer, W.A., Appl. Spectrosc., 1990, 44, 1659.
8. Geyer, T.J. and Weimer, W.A., Appl. Phys. Lett., 1989, 54, 469.
9. Girault, C., Damiani, D., Champeaux, C., Marchet, P., Germain, C., Mercurio, J.P., Aubreton, J. and Cathernot, A., Appl. Surf. Sci., 1990, 46, 78.
10. 2S-HTSC-IV, 5-9 July 1994, Grenoble, France.
11. Klein, J.D. and Yen, A., Appl. Phys. Lett., 1989, 55, 2670.
12. Klein, J.D. and Yen, A., J. Appl. Phys., 1990, 68, 4879.
13. Lucia, M.L., Hernandez-Rojas, J.L., Santamaria, J., Martil, I., Gonzalez-Diaz, G. and Sanchez-Quesada, F., Appl. Phys. Lett., 1992, 61, 231.
14. Ogawa, T., Inoue, K., Morita, K., Senda, A. and Kasanami, T., Phys C, 1991, 185-189, 1961.
15. Otis, C.E. and Dreyfus, R.W., Phys. Rev. Lett., 1991, 67, 2102.
16. Padmaja, G., Ravi Kumar, A.V., Vidyalal, V., Radhakrishnan, P., Nampoori, V.P.N. and Vallabhan, C.P.G., Pramana. J. Phys., 1989, 32, L693.
17. Saenger, K.L., J. Appl. Phys., 1989, 66, 4435.
18. Sakeek, H.F., Higgins, M., Graham, W.G., Morrow, T., Turner. R.J. and Walmsley, D.G., J. Appl. Phys., 1991, 70, 2455.
19. Sakeek, H.F., Morrow, T., Graham, W.G. and Walmsley, W.G., Appl. Phys. Lett., 1991, 59, 3631.
20. Sega, R., Lawconnell, R., Motes, R., Grycewicz, T., McNeil, T. and McNally, J., Proc. Conf. on Sci. and Technol., 14-18.XI. Colorado Sprngs, USA, 1988, p. 53.
21. Sugh, N., Imagawa, K., Saito, S. and Kanehori, K., Jap. J. Appl. Phys., 1991, 30, 48.
22. Weimer, W.A., Appl. Phys. Lett., 1988, 52, 2171.
23. Wu, X.D., Dutta, B., Hedge, M.S., Inam, A., Venkatesan, T., Chase, E.W., Chang, C.C. and Howard, R., Appl. Phys. Lett., 1989, 54, 179.
24. Xi, X.X., Wu, X.D., Inam, A., Li, Q., Hemmick, D., Findikoglu, A., Venkatesan, T. and Chang, C.C., Appl. Phys. Lett., 1990, 57, 96.
25. Ying, Q.Y., Shaw, D.T. and Kwok, H.S., Appl. Phys. Lett., 1988, 53, 1762.
26. Yoo, K.M., Alfano, R.R., Guo, X. and Sarachik, M.P., Appl. Phys. Lett., 1989, 54, 1278.
27. Sakeek, H.F., Morrow, T., Graham, W.G. and Walmsley, D.G., J. Appl. Phys., 1994, 75, 1138.
28. Fork, D.K., Ponce, F.A., Tramontana, J.C. and Geballe, T.H., Appl. Phys. Lett., 1991, 58, 2294, and references therein; Sanchez, F., Varela, M., Queralt, X., Aguiar, R. and Morenza, J.L., ibid, 1992, 61, 2228; Merchant, P., Jacowitz, R.D., Tibbs, K., Taber, R.C. and Laderman, S.S., ibid, 1990, 60, 763.
29. Fork, D.K., Ponce, F.A., Tramontana, J.C. and Geballe, T.H., Appl. Phys. Lett., 1991, 58, 2294, and references therein; Sanchez, F., Varela, M., Queralt, X., Aguiar, R. and Morenza, J.L., ibid, 1992, 61, 2228; Merchant, P., Jacowitz, R.D., Tibbs, K., Taber, R.C. and Laderman, S.S., ibid, 1990, 60, 763.
30. Fork, D.K., Ponce, F.A., Tramontana, J.C. and Geballe, T.H., Appl. Phys. Lett., 1991, 58, 2294, and references therein; Sanchez, F., Varela, M., Queralt, X., Aguiar, R. and Morenza, J.L., ibid, 1992, 61, 2228; Merchant, P., Jacowitz, R.D., Tibbs, K., Taber, R.C. and Laderman, S.S., ibid, 1990, 60, 763.
31. see e.g. Kwok, H.S. and Ying, Q.Y., Phys. C, 1991, 177, 122.
32. Borman, R. and Nolting, J., Phys. C, 1989, 162-164, 81; Hammond, R.H. and Bormann, R., ibid, p. 703.
33. Borman, R. and Nolting, J., Phys. C, 1989, 162-164, 81; Hammond, R.H. and Bormann, R., ibid, p. 703.
34. Sawa, A., Kosaka, S. and Obara, H., Aoki, K., IEEE Trans. Appl. Supercond., 1993, 3, 1088.
35. Girault, C., Ph.D. thesis, Limoges, 1990.
36. Xi, X.X., Venkatesan, T., Li, Q., Wu, X.D., Inam, A., Chang, C.C., Ramesh, R., Hwang, D.M., Ravi, T.S., Findikoglu, A., Hemmick, D., Etemad, S., Martinez, J.A. and Wilkens, B., IEEE Trans. Mag., 1991, 27, 982.
37. Tsaneva, V., Tomov, R., Ouzounov, D. and Donchev, T., C.r. Acad. Sci. Bulg., 1996, 49, 21, and references therein.
38. Eom, C.B., Sun, J.Z., Yamamoto, K., Marshall, A.F., Luther, K.E., Ladermann, S.S. and Geballe, T.H., Appl. Phys. Lett., 1989, 55, 595.
39. Tsanev, V., Program Software Package SPECTRUM developed under Contract NZ-419.
40. Zaidel, A.N., Prokofev, V.K., Raiskii, S.M., Slavnii, V.A. and Shrieder, E.Ya., Tables of Spectral Lines. Nauka, Moscow, 1977.
41. Nurgaliev, T., Phys. C, 1995, 249, 2532.
42. Tsaneva, V., Donchev, T. and Nurgaliev, T., In Appl. Supercond. Inst. Phys. Conf. Ser. No 148, v.2, IOP Publ. Ltd, 1995, p. 839.
43. see Braun, M., Ph.D. thesis, Stockholm, 1978 and references therein.
44. Tsaneva, V., Ph.D. thesis, Sofia, 1996.
45. CIPA-CT 94-0193 Report, 1995.
46. Lee, W.Y., Salem, J.R., Lee, V.Y., Huang, T.C. and Savoy, R., Phys. C, 1989, 162-164, 639.
47. Walkup, R.E., Saenger, K.L. and Selwyn, G.S., J. Chem. Phys., 1986, 84, 2668.
48. Kumar Thareja, V., J. Appl. Phys., 1990, 67, 3260.
49. Barchukov, A.I. et al., Zh. Eksp. Teor. Fiz. (in Russian), 1974, 66, 965.
50. Fried, D., Jodeh, S., Reck, G.P., Rothe, E.W. and Kushida, T., J. Appl. Phys., 1994, 75, 522.
51. Adhi, K.P., Kale, S., Padhye, Y., Limaye, A.V. and Ogale, S.B., Int. J. Mod. Phys. B, 1995, 9, 3571.
52. Fried, D., Reck, G.P., Kushida, T. and Rothe, E.W., J. Phys. D, 1991, 24, 1065.
53. Sanchez, F., Aguiar, R., Serra, P., Varela, M. and Morenza, J.L., in Proc. 10th Int. Conf. on Thin Films, 23-27 September 1996, Salamanca, Spain; Goeres, J., Kung, P.-J., Fenner, D.B. and Budnick, J.I., Rev. Sci. Instrum, (in press, 15 October, 1996).
54. Sanchez, F., Aguiar, R., Serra, P., Varela, M. and Morenza, J.L., in Proc. 10th Int. Conf. on Thin Films, 23-27 September 1996, Salamanca, Spain; Goeres, J., Kung, P.-J., Fenner, D.B. and Budnick, J.I., Rev. Sci. Instrum, (in press, 15 October, 1996).
55. Cotton, F.A. and Wilkinson, G., in Advanced Inorganic Chemistry, 3rd ed. Interscience Publishers, New York, London, Sydney, Toronto, 1972, Pt.II, and references therein.
56. Wolf, P.J., J. Appl. Phys., 1994, 76, 1480.
57. Foltyn, S.R., Dye, R.C., Ott, K.C., Peterson, E., Hubbard, K.M., Hutchinson, W., Muenchausen, R., Estler, R.C. and Wu, X.D., Appl. Phys. Lett., 1991, 59, 594.
58. Youna, K.H., Phys. C, 1993, 211, 1.
59. Pinto, R., Pai, S.P., D'Souza, C.P., Gupta, L.C. and Vijayaraghavan, R., Phys.C, 1992, 196, 264.
60. Auciello, O., Krauss, A.R., Santiago-Aviles, J., Schreiner, A.F. and Gruen, D.M., Appl. Phys. Lett., 1988, 52, 239.
61. Tsaneva, V. and Tomov, R., Czech. J. Phys. 1996, 46-S3, 1529; Tomov, R., Tsaneva, V., Tsanev, V. and Ouzounov, D., J. Low Temp. Phys. 1996, 105, 1-3107; Tomov, R.I., Manolov, V.P., Atanasov, P.A., Tsaneva, V.N., Ouzounov, D.G. and Tsanev, V.I., Phys. C, 1997, 274, 1.
62. Tsaneva, V. and Tomov, R., Czech. J. Phys. 1996, 46-S3, 1529; Tomov, R., Tsaneva, V., Tsanev, V. and Ouzounov, D., J. Low Temp. Phys. 1996, 105, 1-3107; Tomov, R.I., Manolov, V.P., Atanasov, P.A., Tsaneva, V.N., Ouzounov, D.G. and Tsanev, V.I., Phys. C, 1997, 274, 1.
63. Tsaneva, V. and Tomov, R., Czech. J. Phys. 1996, 46-S3, 1529; Tomov, R., Tsaneva, V., Tsanev, V. and Ouzounov, D., J. Low Temp. Phys. 1996, 105, 1-3107; Tomov, R.I., Manolov, V.P., Atanasov, P.A., Tsaneva, V.N., Ouzounov, D.G. and Tsanev, V.I., Phys. C, 1997, 274, 1.
64. Sanchez, F., Aguiar, R., Serra, P., Varela, M. and Morenza, J.L., Appl. Surf. Sci., 1993, 69, 221.