Profiling the residual stress and integral strain distribution in yttrium implanted titanium nitride

Vacuum

Volumn 48, Issue 10, 1997, Pages 833-838

  Perry, Anthony J ^a,c   Geist, Daniel E ^b  

^a ISM Technologies Inc   (United States)

^b LOCKHEED MARTIN   (United States)

^c AIMS Marketing   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC COATINGS; ION IMPLANTATION; RESIDUAL STRESSES; STRAIN; STRESS ANALYSIS; VACUUM APPLICATIONS; YTTRIUM;

COMPRESSIVE STRESSES; TENSILE STRESSES;

TITANIUM NITRIDE;

EID: 0031250413     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(97)00034-1     Document Type: Article

References (24)

1. McHargue, C., Int. Met. Rev., 1986, 31, 49.
2. Didenko, A. N., Kozlov, E. V., Sharkeev, Yu. P., Tailashev, A. S., Ryabchikov, A. I., Pranjavichus, L. and Augulis, L., Surf. Coat. Technol., 1993, 56, 97.
3. Baibaratskaya, M. Yu., Zubarev, V. S., Mashkov, Yu. K., Sazanov, Yu. A., Tajlashev, A. S. and Sharkeev, Yu. P., Izv. Vyssh. Uchebn. Zaved, Fizika, 1992, 7, 22.
4. Sharkeev, Yu. P., Kozlov, E. V., Didenko, A. N., Kolupaeva, S. N. and Vihor, N. A., Surf. Coat. Technol., 1997.
5. Sharkeev, Yu. P., Didenko, A. N. and Kozlov, E. V., Surf. Coat. Technol., 1994, 65, 112.
6. Kurakin, I. B., Ligachov, A. E., Remnev, J. E. and Sipailo, M. G., Surf. Coat. Technol., 1992, 51, 180.
7. Ligachov, A. E., in Proc. 1st Int. Symp. Beam Technologies. Dubna, 1995.
8. Sharkeev, Yu. P., Didenko, A. N. and Kozlov, E. V., Russian Phys. J., 1994, 37(5), 478.
9. Kolobov, Yu. R., Sharkeev, Yu. P., Abdrashitov, V. G. and Kashin, O. A. Ch. 15 in Physical Mesomechanics of Heterogeneous Media and Computer-Aided Design of Materials, ed. V.E. Panin. Cambridge, 1996.
10. Perry, A. J., Geist, D. E., Narasimhan, K. and Treglio, J. R., Surf. Coat. Technol., 1996, 86-87, 364.
11. Geist, D. E., Perry, A. J., Treglio, J. R., Valvoda, V. and Rafaja, D., Adv. X-ray Anal., 1995, 38, 471.
12. Bull, S. J., Rice-Evans, P., Saleh, A., Perry, A. J. and Treglio, J. R., Surf. Coat. Technol., 1997, 91, 7.
13. Ocks, E. M., Brown, I. G., Dickinson, M. R., MacGill, R. A., Emig, H., Spädtke, P. and Wolf, B. H., Appl. Phys. Lett., 1995, 67, 200.
14. Ryabchikov, A. I. and Nasyrov, R. A., Nucl. Instr. Meth. Phys. Res., 1991, B61, 48.
15. Howard, S. A. and Snyder, R. L., Adv. X-ray Anal., 1983, 26, 73; J. Appl. Crystallogr., 1989, 22, 238, 244.
16. Howard, S. A. and Snyder, R. L., Adv. X-ray Anal., 1983, 26, 73; J. Appl. Crystallogr., 1989, 22, 238, 244.
17. Perry, A. J., Valvoda, V. and Rafaja, D., Thin Solid Films, 1992, 214, 169.
18. von Laue, M., Z. Kristallogr., 1926 64, 115; a discussion is given in: Wagner, C. N. J. and Aqua, E. N., Adv. X-ray Anal., 1978 7, 192.
19. von Laue, M., Z. Kristallogr., 1926 64, 115; a discussion is given in: Wagner, C. N. J. and Aqua, E. N., Adv. X-ray Anal., 1978 7, 192.
20. Rice-Evans, P. C., Saleh, A. S. and Bull, S. J., Appl. Surf. Sci., 1995, 85, 320.
21. Perry, A. J., Treglio, J. R., Valvoda, V. and Rafaja, D., J. Vac. Sci. Technol. A., 1995, 13, 1067.
22. Perry, A. J., Valvoda, V., Rafaja, D., Williamson, D. L. and Sartwell, B. D., Surf. Coat. Technol., 1992, 54/55, 180.
23. Ernsberger, C., Perry, A. J., Lehman, L. P., Miller, A. E., Pelton, A. R. and Dabrowski, B. W., Surf. Coat. Technol., 1988, 36, 605.
24. Hultman, L., Sundgren, J. -E., Petrov, I. and Greene, J. E., J. Appl. Phys., 1991, 69, 6437.