Direct bonding between aluminum and silicon by the formation of hydrogen bonds

JSME International Journal, Series A: Mechanics and Material Engineering

Volumn 40, Issue 4, 1997, Pages 453-458

  Nagakubo, Masao ^a   Suzuki, Harumi ^a   Hattori, Tadashi ^a  

^a DENSO CORPORATION   (Japan)

Author keywords

Aluminum; Direct Bonding; Hydrogen Bonds; Hydrophilic Treatment; Micromachine; Nontraditional Machining; OH Groups; Silicon; Surface Treatment

Indexed keywords

ABSORPTION SPECTROSCOPY; ALUMINUM; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; HYDROGEN; HYDROGEN BONDS; INTERFACES (MATERIALS); ION BOMBARDMENT; OXYGEN; SECONDARY ION MASS SPECTROMETRY; SILICON; SURFACE TREATMENT;

DIRECT BONDING; HYDRO ION; HYDROPHILIC TREATMENT; REFLECTION ABSORPTION SPECTROSCOPY;

BONDING;

EID: 0031250176     PISSN: 13408046     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmea.40.453     Document Type: Article

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