The small angle cleavage technique applied to coatings and thin films

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 399-405

  Walck, S D ^a   McCaffrey, J P ^b  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Characterization; Cross sectional TEM; Small angle cleavage technique; Transmission electron microscopy

Indexed keywords

MULTILAYERS; PROTECTIVE COATINGS; QUARTZ; SAPPHIRE; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON; SILICON CARBIDE; SPECIMEN PREPARATION; SUBSTRATES; THIN FILMS;

SMALL ANGLE CLEAVAGE TECHNIQUE (SCAT);

TRANSMISSION ELECTRON MICROSCOPY;

EID: 0031249590     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00594-4     Document Type: Article

References (7)

1. J.P. McCaffrey, Ultramicroscopy, 38 (1991) 149.
2. J.P. McCaffrey, in R. Anderson, B. Tracy and J. Bravman (eds.), Specimen Preparation for Transmission Electron Microscope of Materials: III, Materials Research Society, Materials Research Society Symposium Proceedings, Vol. 254, Pittsburgh, 1992, p. 109.
3. J.P. McCaffrey, Microsc. Res. Techn., 24 (1993) 180.
4. S.D. Walck, Microsc. Today, 96-4 (1996).
5. S.D. Walck and J.P. McCaffrey, in R. Anderson and S. Walck (eds.), The Small Angle Cleavage Technique: An Update, Specimen Preparation for Transmission Electron Microscopy of Materials: IV, Materials Research Society, Materials Research Society Symposium Proceedings, Vol. 480, Pittsburgh, 1997, in press.
6. S.D. Walck, J.S. Zabinski, N.T. McDevitt and J.E. Bultman, Thin Solid Films, (1997) in press.
7. J. Benedict, R. Anderson and S.J. Klepeis, in R. Anderson, B. Tracy and J. Bravman (eds.), Specimen Preparation for Transmission Electron Microscopy of Materials: III, Materials Research Society, Materials Research Society Symposium Proceedings, Vol. 254, Pittsburgh, 1992, p. 121.