Self-neutralized ion implantation into insulators

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 132, Issue 1, 1997, Pages 188-192

  Liu, F ^a,b   Monteiro, O R ^a   Yu, K M ^a   Brown, I G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b BEIJING NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRIC INSULATING MATERIALS; ELECTRIC SPACE CHARGE; ELECTRONS; ION BEAMS; ION SOURCES; SUBSTRATES; VACUUM APPLICATIONS;

COLD ELECTRONS; VACUUM ARC ION SOURCES;

ION IMPLANTATION;

EID: 0031249530     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00385-6     Document Type: Article

References (13)

1. See, for instance, the proceedings of the biennial conferences on Ion Implantation Technology (IIT) published in Nucl. Instr. and Meth.
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3. M. Iwaki, Critical Rev. in Solid State and Mat Sci. 15 (1989) 473.
4. See, for instance, The Proceedings of the Biennial Conferences on Ion Beam Modification of Materials (IBMM), published in Nucl. Instrum. Meth., and on the Surface Modification of Metals by Ion Beams (SMMIB), published in Surf. Coat. Technol.
5. M.E. Mack, Nucl. Instr. and Meth. B 37/38 (1989) 472.
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11. E.W. McDaniel, Collision Phenomena in Ionized Gases, Ch. 6, Wiley, New York, 1964.
12. Ian Brown, An intense metal ion beam source for heavy ion fusion, in: M. Reiser, T. Godlove, R. Bangerter (Eds.), Heavy Ion Inertial Fusion, AIP Conf. Proc. Ser. vol 152 AIP, New York, 1986.
13. See, for example, R.A. Baragiola, Electron emission from slow ion-solid interactions, in: J.W. Rabalais (ed.), Low Energy Ion-Surface Interactions, Ch. 4, Wiley, New York, 1994.