Vacuum arc evaporation with programable erosion and deposition profile

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 592-596

  Siemroth, Peter ^a   Zimmer, Otmar ^a   Schülke, Thomas ^a,c   Vetter, Jörg ^b  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^b Metaplas Ionon   (Germany)

^c CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

Author keywords

Programable vacuum arc evaporation

Indexed keywords

CATHODES; COMPUTER CONTROL; DEPOSITION; EROSION; VACUUM APPLICATIONS;

VACUUM ARC EVAPORATION;

EVAPORATION;

EID: 0031247992     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00502-1     Document Type: Article

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