High-performance Si-SiGe HBTs SiGe-technology development in Esprit Project 8001 TIBIA: An overview

Solid-State Electronics

Volumn 41, Issue 10, 1997, Pages 1493-1502

  Terpstra, D ^a   De Boer, W B ^a   Slotboom, J W ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING;

DOUBLE POLYSILICON TRANSISTORS;

HETEROJUNCTION BIPOLAR TRANSISTORS;

EID: 0031247476     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(97)00095-6     Document Type: Article

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