Optical limitations to cell size reduction in it-ccd image sensors

IEEE Transactions on Electron Devices

Volumn 44, Issue 10, 1997, Pages 1599-1603

  Satoh, Takashi ^a   Mutoh, Nobuhiko ^a   Furumiya, Masayuki ^a   Murakami, Ichiro ^a   Suwazono, Shinobu ^a   Ogawa, Chihiro ^a   Hatano, Keisuke ^a   Utsumi, Hiroaki ^a   Kawai, ShiN'Ichi ^a   Arai, Kouichi ^a   Morimoto, Michihiro ^a   Orihara, Kozo ^a   Tamura, Takao ^a   Teranishi, Nobukazu ^a   Hokari, Yasuaki ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; DIFFRACTION; PHOTODIODES; PHOTOELECTRIC CELLS; SENSITIVITY ANALYSIS; SIZE DETERMINATION;

APERTURE; INTERLINE TRANSFER CHARGE COUPLED DEVICES; PHOTOSHIELD; THICKNESS;

IMAGE SENSORS;

EID: 0031246712     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.628810     Document Type: Article

References (9)

1. N. Mutoh et al. A 1/4 inch 380 k pixel IT-CCD image sensor employing gate-assisted punchthrough read-out modein IEDM Tech. Dig. 1993 pp. 563-566.
2. M. Morimoto et al. A 2/3-inch 2M-pixel IT-CCD image sensor with individual p-wells for separate V-CCD and H-CCD formationISSCC Dig. Tech. Papers pp. 222-223 1994.
3. T. Nakamura K. Matsumoto and T. NomotoA CMD image sensor-An approach to high-resolution imaging IEEE CCD Workshop Dana Point CA 1995.
4. B. J. LinElectromagnetic near-field diffraction of a medium slitJ. Opt. Soc. Am. vol. 62 no. 8 pp. 976-981 1972.
5. I. Takahashi and T. KanekoThe development of a mid-range HDTV cameraITE Tech. Rep. vol. 19 no. 20 pp. 35-40 1995 (in Japanese).
6. A. Toyoda Y. Suzuki K. Orihara and Y. HokariA novel tungsten light-shield structure for high density CCD image sensorsIEEE Trans. Electron Devices vol. 38 pp. 965-968 May 1991.
7. H. Tanabe H. Inui Y. Ogura and S. KishidaPolarization dependence of electric field intensity distributions in photoresist filmsJpn. J. Appl. Phys. vol. 33 pp. 6998-7000 1994.
8. T. Satoh et al. Optical limitations to cell size reduction in IT-CCD image sensorsin IEDM Tech. Dig. 1995 pp. 159-166.
9. S. M. Sze Physics of Semiconductor Devices 2nd ed. New York: Wiley 1981 ch. 13.