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Thin Solid Films

Volumn 307, Issue 1-2, 1997, Pages 29-37

Deposition of boron carbide by laser CVD: A comparison with thermodynamic predictions

(2) Oliveira, J C a Conde, O a

a UNIVERSITY OF LISBON (Portugal)

Author keywords

Boron carbide; Chemical vapour deposition (CVD); Laser irradiation; X ray diffraction

Indexed keywords

ARGON; CARBON DIOXIDE LASERS; CHEMICAL VAPOR DEPOSITION; COMPUTATIONAL METHODS; CRYSTAL STRUCTURE; FUSED SILICA; HYDROGEN; METHANE; PHASE COMPOSITION; THERMODYNAMICS; THIN FILMS;

BORON CHLORIDE; LASER CHEMICAL VAPOR DEPOSITION (LCVD);

BORON CARBIDE;

EID: 0031246625 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00298-8 Document Type: Article

Times cited : (39)

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