Single cycle plasma nitriding and hard coating deposition in a cathodic arc evaporation device

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 261-267

  Sanchette, F ^a   Damond, E ^a   Buvron, M ^a,b   Henry, L ^a   Jacquot, P ^a   Randall, N ^c   Alers, P ^c  

^a Innovatique   (France)

^b Vide Et Traitements Services   (France)

^c CSEM   (Switzerland)

Author keywords

Cathodic arc evaporation; Hard coating; Plasma assisted nitriding

Indexed keywords

ADHESION; ELECTRON BEAMS; EVAPORATION; INDUSTRIAL FURNACES; NITRIDING; PLASMA APPLICATIONS; PROTECTIVE COATINGS; SUBSTRATES; VAPOR DEPOSITION;

CATHODIC ARC EVAPORATION; HARD COATINGS; PHYSICAL VAPOR DEPOSITION (PVD); PLASMA ASSISTED NITRIDING;

STEEL;

EID: 0031246491     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00456-8     Document Type: Article

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