Characterisation of Sol-Gel TiO2 Films by Etching

Journal of Sol-Gel Science and Technology

Volumn 10, Issue 2, 1997, Pages 193-202

  Bernards, T N M ^a   Huls, B G ^a   Van Bommel, M J ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Coatings; Etching; Spinning; TiO2 films; Wet chemical processing

Indexed keywords

COMPOSITION EFFECTS; ETCHING; HYDROCHLORIC ACID; HYDROLYSIS; MORPHOLOGY; OPTICAL COATINGS; REACTION KINETICS; SOL-GELS; THIN FILMS; TITANIUM DIOXIDE; TRANSMISSION ELECTRON MICROSCOPY;

HYDROFLUORIC ACID; TETRAETHYLORTHOTITANATE;

OPTICAL FILMS;

EID: 0031246452     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018307931561     Document Type: Article

References (15)

1. J.H. Lammers, S.B.G.M. O'Brien, and M.N.M. Beerens, in Proc. First European Coating Symposium (Leeds, 19-22 Sept. 1995), Proceedings (to appear).
2. I.J.M. Snijkers-Hendrickx and J. van de Ven, in Proc. of 17th Int. Conf. on Glass (Beijing, 1995), vol. 4, p. 9.
3. H.K. Pulker, Thin Film Science and Technology (Elsevier, Amsterdam, 1984), vol. 6.
4. H. Dislich, in Sol-Gel Technology for Thin Films, Fibers, Preforms, Electronics and Speciality Shapes, edited by L.C. Klein (Noyes Publ., Park Ridge, NJ, 1988), p. 50.
5. R.C. Petit, C.S. Ashley, S.T. Reed, and C.J. Brinker, in Sol-Gel Technology for Thin Films, Fibers, Preforms, Electronics and Speciality Shapes, edited by L.C. Klein (Noyes Publ., Park Ridge, NJ, 1988), p. 80.
6. S. Sakka, J. Sol-Gel Science and Technology 2, 451 (1994).
7. B.E. Yoldas, J. Materials Science 21, 1087 (1986).
8. M.J. van Bommel and T.N.M. Bernards, J. Sol-Gel Science and Technology 8 (1996).
9. S. Maekawa and T. Ohishi, J. Non-Crystalline Solids 169, 207 (1994).
10. TFCalcTM, Software Spectra Inc. Portland, OR, U.S.A.
11. E. Bright and D.W. Readey, J. Am. Ceram. Soc. 70, 900 (1987).
12. G.A.C.M. Spierings, J. Materials Science 28, 6261 (1993).
13. C.J. Brinker and G.W. Scherer, in Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing (Academic Press, San Diego, 1990), p. 48.
14. J. Livage, M. Henry, and C. Sanchez, Prog. Solid State Chem. 18, 259 (1988).
15. M. Born and E. Wolf, Principles of Optics (Pergamon, New York, 1975), p. 87.