Modeling of high-pressure, high-frequency (RF) oxygen plasmas

IEEE Transactions on Plasma Science

Volumn 25, Issue 5, 1997, Pages 1034-1041

  Tsuenwai, David ^a   Subramanian, N S ^a   Heberlein, Joachim V R ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

Modeling; Oxygen; Pressures of 1 and 5 atm; Rf thermal plasmas

Indexed keywords

ENERGY DISSIPATION; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; OXYGEN; PLASMA PROBES; PRESSURE EFFECTS;

INDUCTIVELY COUPLED THERMAL PLASMAS; PLASMA REACTORS; RADIO FREQUENCY OXYGEN PLASMAS;

PLASMA SIMULATION;

EID: 0031246328     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.649623     Document Type: Article

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