Surface application of metal silicides for improved electrical properties of field-emitter arrays

Smart Materials and Structures

Volumn 6, Issue 5, 1997, Pages 633-639

  Chung, I J ^a   Hariz, A ^a  

^a UNIVERSITY OF SOUTH AUSTRALIA   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHROMIUM COMPOUNDS; ELECTRIC CONDUCTIVITY; ETCHING; HARDNESS; MATHEMATICAL MODELS; MORPHOLOGY; SEMICONDUCTING SILICON; SURFACES; THERMAL EFFECTS; TITANIUM COMPOUNDS;

CHROMIUM SILICIDE; DISCHARGE RESISTANCE; ENERGY BAND MODEL; FIELD EMITTER ARRAYS; MICROTIPS; SILICIDATION; SILICON FIELD EMITTER; TITANIUM SILICIDE;

FIELD EMISSION CATHODES;

EID: 0031245283     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/6/5/016     Document Type: Article

References (10)

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