Method of fabrication of ISFET-based biosensors on an Si-SiO2-Si structure

Sensors and Actuators, B: Chemical

Volumn 44, Issue 1-3, 1997, Pages 361-364

  Poghossian, Arshak S ^a,b,c  

^a STATE ENGINEERING UNIVERSITY OF ARMENIA   (Armenia)

^b Microsensor Ltd ^*  (Germany)

^c Univ of Management and Information   (Armenia)

Author keywords

Biosensors; Ion selective field effect transistor; Silicon insulator silicon structure

Indexed keywords

GLUCOSE SENSORS; ION SENSITIVE FIELD EFFECT TRANSISTORS; SILICA;

SILICON INSULATOR SILICON STRUCTURE;

BIOSENSORS;

EID: 0031245209     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00202-5     Document Type: Article

References (8)

1. H. Sakai, N. Kaneki, H. Hara, Analytical application for chemicals using an enzyme sensor based on an ISFET, Sensors and Actuators B 13/14 (1993) 578-580.
2. A.A. Shul'ga, A.C. Sandrovsky, V.I. Strikha, Overall characterization of ISFET-based glucose biosensor, Sensors and Actuators B 10 (1992) 41-46.
3. B.H. van der Schoot, P. Bergveld, ISFET-based enzyme sensors, Biosensors 3 (1987) 161-186.
4. S. Nakamoto, N. Ito, T. Kuriyama, J. Kimura, A lift-off method for patterning enzyme-immobilized membranes in multi-biosensors, Sensors and Actuators 13 (1988) 165-172.
5. J. Kimara, T. Munakami, T. Kuriyama, An integrated multi-biosensor for simultaneous amperometric and potentiometric measurement, Sensors and Actuators 15 (1988) 435-443.
6. Y. Hanazato, M. Nakako, S. Shiono, M. Maeda, Integrated multi-biosensors based on an ion-sensitive field-effect transistor using photolitographic technique, IEEE Trans. Electron Devices 36 (1989) 1303-1310.
7. A.S. Poghossian, V.M. Haroutunian, K.S. Karapetian, Semiconductor sensor for selective determination of chemical components in liquid medium, Author's Certificate SU 1508751 A1, 1986 (in Russian).
8. 2-Si structure, Sensors and Actuators B 13/14 (1993) 653-654.