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Volumn 180, Issue 3-4, 1997, Pages 381-387
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Modulating dopant segregation in floating-zone silicon growth in magnetic fields using rotation
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Author keywords
Floating zone; Magnetic field; Rotation; Segregation; Silicon; Simulation
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Indexed keywords
COMPUTER SIMULATION;
CRYSTAL GROWTH FROM MELT;
FINITE VOLUME METHOD;
FLOW PATTERNS;
HEAT CONVECTION;
MAGNETIC FIELD EFFECTS;
MASS TRANSFER;
MIXING;
PHASE INTERFACES;
SEMICONDUCTOR DOPING;
SEMICONDUCTOR GROWTH;
DOPANT SEGREGATION EFFECTS;
FLOATING ZONE GROWTH;
NEWTON METHOD;
ROTATING MAGNETIC FIELDS;
SEMICONDUCTING SILICON;
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EID: 0031244748
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(97)00264-9 Document Type: Article |
Times cited : (15)
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References (9)
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