Vibration-resistant direct-phase-detecting optical interferometers

Applied Optics

Volumn 36, Issue 28, 1997, Pages 7162-7171

  Carlson, Timothy B ^a   Denzer, Steven M ^a   Greenlee, Thomas R ^b   Groschen, Robert P ^a   Peterson, Richard W ^b   Robinson, Glen M ^a  

^a 3M COMPANY   (United States)

^b BETHEL UNIVERSITY   (United States)

Author keywords

Acousto optic modulator; Differential; Dual beam; Frequency shift; Inspection; Interferometer; Interferometry; Laser; Metrology; Moving surface; Moving web; On line; Online; Optical interferometry; Optics; Photodetector; Polarization; Process; Scanning; Wollaston prism

Indexed keywords

ACOUSTOOPTICAL DEVICES; INTERFEROMETRY; LASER BEAMS; LIGHT MODULATORS; NUMERICAL METHODS; OPTICAL BEAM SPLITTERS; PHOTODETECTORS; PRISMS; SURFACE MEASUREMENT;

ACOUSTOOPTIC MODULATOR; LASER SCANNING INTERFEROMETER; OPTICAL INTERFEROMETRY; SURFACE ROUGHNESS MEASUREMENT; WOLLASTON PRISM;

INTERFEROMETERS;

EID: 0031244655     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.007162     Document Type: Article

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