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Volumn 63, Issue 10, 1997, Pages 1459-1463
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Fundamental study on electrical discharge machining of single crystalline silicon
a a a a
a
NONE
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Author keywords
EDM; High resistivity; Removal rate; Single crystalline silicon; Single pulse discharge
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Indexed keywords
ELECTRIC CONDUCTIVITY OF SOLIDS;
ELECTRIC DISCHARGES;
ELECTRODES;
MACHINING;
SINGLE CRYSTALS;
ELECTRIC DISCHARGE MACHINING (EDM);
SINGLE PULSE DISCHARGE;
SEMICONDUCTING SILICON;
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EID: 0031244652
PISSN: 09120289
EISSN: None
Source Type: Journal
DOI: 10.2493/jjspe.63.1459 Document Type: Article |
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Times cited : (4)
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References (6)
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