Carbon stripper foil preparation by ion beam sputtering with 3.5 keV Kr ions

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 397, Issue 1, 1997, Pages 137-139

  Sugai, I ^a   Oyaizu, M ^a   Kawakami, H ^a   Hattori, T ^b   Tomizawa, H ^b   Kawasaki, K ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Carbon stripper; Electron diffraction; Purity of target; Sputtering; Stripper lifetime; Vacuum deposition

Indexed keywords

CARBON; ELECTRON DIFFRACTION; ION BEAMS; ION BOMBARDMENT; MAGNETRON SPUTTERING; VAPOR DEPOSITION;

CARBON STRIPPER FOILS; ION BEAM SPUTTERING;

TARGETS;

EID: 0031237364     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(97)00763-8     Document Type: Article

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