Preparation and characterization of Ba(Zr,Ti)O3 thin films by sputtering

Journal of the Ceramic Society of Japan

Volumn 105, Issue 9, 1997, Pages 746-749

  Kamehara, Nobuo ^a   Tsukada, Mineharu ^a   Cross, Jeffrey S ^a   Kurihara, Kazuaki ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Ba(Zr,Ti)O3; Capacitor; Sputtering; Substrate; Thin film

Indexed keywords

BARIUM COMPOUNDS; CAPACITORS; CRYSTAL ORIENTATION; LEAKAGE CURRENTS; MAGNESIA; PERMITTIVITY; PEROVSKITE; PLATINUM; SPUTTER DEPOSITION; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

BARIUM ZIRCONATE TITANATE; LOSS TANGENT;

DIELECTRIC FILMS;

EID: 0031235845     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.105.746     Document Type: Article

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