A new process for the fabrication of silicon-on-insulator structures by using porous silicon

Materials Letters

Volumn 32, Issue 4, 1997, Pages 287-290

  Chang, Chunk Cheng ^a   Chen, Lai Cheuan ^a  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

Porous silicon; Silicon on insulator

Indexed keywords

FABRICATION; POROUS SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SILICON ON INSULATOR TECHNOLOGY;

CURRENT DENSITY CONTROLLING METHOD; SILICON ON INSULATOR STRUCTURES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031235623     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(97)00047-5     Document Type: Article

References (12)

1. J.P. Colinge, Silicon on Insulator Technology: Materials to VLSI (Kluwer Academic Publishers, Dordrecht, 1991).
2. J.P. Colinge, IEEE Trans. Electron Dev. 10 (1987) 2173.
3. S. Cristoloveanu, S.M. Gulwadi, D.E. Ioannou, G.J. Campisi, H.L. Hughes, IEEE Electron Dev. Lett. 13 (1992) 603.
4. W. Buttler, I.B. Buttler, G. Cesura, P.F. Manfredi, V. Re, V. Speziali, G. Burbach, H. Hogt, 1993 IEEE Int. SOI Conf. Proc., PI 86, Palm Spring, CA.
5. S.S. Earon, B. Lalevic, IEEE Trans. Eletron Dev. EP-25 (1978) 907.
6. S.K. Chang, S.Y. Han, J.C. Shin, Y.I. Choi, S.B. Kim, IEEE Electron Dev. Lett. 17 (1996) 22.
7. S.P. Shinha, A. Zaleski, D.E. Ioannou, G.J. Campisi, H.L. Hughes, IEEE Electron Dev. Lett. 17 (1996) 121.
8. K.R. Hofmann, C. Werner, W. Werner, G. Dorda, IEEE Trans. Electron Dev. 32 (1985) 691.
9. J.H. Choi, Y.J. Park, H.S. Min, IEEE Tech. Dig., (1994) 645.
10. J.H. Choi, Y.J. Park, H.S. Min, IEEE Electron Dev. Lett. 17 (1996) 175.
11. Q. Lu, P. Ratnam, C.A.T. Salama, Solid State Electronics 13 (1992) 1745.
12. D. Flandre, J.P. Eggerment, D. De Censter, P. Jespers, Electron. Lett. 30 (1994) 1933.