A production process of silicon sensor elements for a fibre-optic pressure sensor

Sensors and Actuators, A: Physical

Volumn 63, Issue 1, 1997, Pages 69-74

  Strandman, Carola ^a   Smith, Leif ^b   Tenerz, Lars ^b   Hök, Bertil ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b Radi Medical Systems AB   (Sweden)

Author keywords

Anisotropic etching; Guide wire fibre optic pressure sensors; Potassium hydroxide; 100 Planes

Indexed keywords

ANISOTROPY; ETCHING; LITHOGRAPHY; MICROMACHINING; PRESSURE TRANSDUCERS; SILICON SENSORS;

ANISTROPIC ETCHING; FIBRE OPTIC PRESSURE SENSORS; POTASSIUM HYDROXIDE;

FIBER OPTIC SENSORS;

EID: 0031235296     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80430-X     Document Type: Article

References (17)

1. H. Emanuelsson, M. Dohnal, C. Lamm and L. Tenerz, Initial experiences with a miniaturized pressure transducer during coronary angioplasty, Catheterization Cardiovascular Diagnosis, 24 (1991) 137-143.
2. N.H.J. Pijls and B. De Bruyne, Practice and interpretation of intracoronary pressure recordings and calculation of flow reserve, Intracoronary Diagnostic Techniques in Interventional Cardiology, European Heart House, Nice, France, 13-15 Jan., 1994.
3. K.E. Petersen, Silicon as a mechanical material, Proc. IEEE, 70 (1982) 420-457.
4. J. Ji, S.T. Cho, Y, Zhang, K. Najafi and K.D. Wise, An ultraminiature CMOS pressure sensor for a multiplexed cardiovascular catheter, IEEE Trans. Electron Devices, 39 (1992) 2260-2267.
5. X.P. Wu, M.F. Hu, J.Y. Shen and Q.H. Ma, A miniature piezoresistive catheter pressure sensor, Sensors and Actuators A, 35 (1993) 197-201.
6. L.A. Christel and K. Petersen, A catheter pressure sensor with side vent using multiple silicon fusion bonding, Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7-10 June, 1993, pp. 620-623.
7. M.A. Chan, S.D. Collins and R.L. Smith, A micromachined pressure sensor with fiber-optic interferometric readout, Sensors and Actuators A, 43 (1994) 196-201.
8. B.E. Meggitt, Optical fibre pressure sensor and temperature sensors for minimal invasive diagnostics: physiological use, Proc. SPIE, Vol. 2360, 10th Int. Conf. Optical Fibre Sensors, Glasgow, UK, 11-13 Oct., 1994, pp. 62-66.
9. Z. Xiao, Applications of artificial microcavities in wafer bonded silicon, Ph.D. Thesis, Dept. Solid State Electronics, School of Electrical and Computer Engineering, Chalmers University of Technology, Gothenburg, Sweden (1996), Technical report no. 285.
10. L. Tenerz, L. Smith and B. Hök, A fiberoptic pressure microsensor for measurements in coronary arteries, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24-28 June, 1991, pp. 1021-1023.
11. L. Smith, L. Tenerz and B. Hök, Ultra-small silicon pressure microsensor for measurements in the coronary arteries, paper no. 3, in Silicon microstructures: fabrication techniques and applications, Ph.D. Thesis, Uppsala University (1993).
12. S.P. Timoshenko and J.M. Gere, Mechanics of Materials, Van Nostrand Reinhold, New York, 1972, Appendix D, p. 515.
13. S.-C. Chang and D.B. Hicks, Mesa structure formation using potassium hydroxide and ethylene diamine based etchants, IEEE Solid-State Sensor and Actuator Workshop, New York, USA, 1988, pp. 102-103.
14. Y. Bäcklund and L. Rosengren, New shapes in (100) Si using KOH and EDP etches, J. Micromech. Microeng., 2 (1992) 75-79.
15. H. Seidel, L. Csepregi, A. Heuberger and H. Baumgärtel, Anisotropic etching of crystalline silicon in alkaline solutions, parts I and II, J. Electrochem. Soc., 137 (1990) 3612-3632.
16. B. Kloeck, S.D. Collins, N.F. De Rooij and R.L. Smith, Study of electrochemical etch-stop for high-precision thickness control of silicon membranes, IEEE Trans. Electron Devices, 36 (1989) 663-669.
17. S. Linder and H. Baltes, High-index-plane etch rates and micromachining of power devices, Tech. Digest, Micromechanics Europe, MME '90, Berlin, Germany, 26-27 Nov., 1990, pp. 25-30.