Local surface potential measurement of Pd/GaAs contact and anodized aluminum films using scanning probe microscopy

Nanotechnology

Volumn 8, Issue 3 SUPPL. A, 1997, Pages

  Nie, H Y ^a   Horiuchi, K ^a   Yamauchi, H ^a   Masai, J ^a  

^a MITSUBISHI CHEMICAL CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; METALLIC FILMS; MICROSCOPIC EXAMINATION; PALLADIUM; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES; SURFACE TREATMENT; VOLTAGE MEASUREMENT;

ALUMINUM FILMS; SCANNING PROBE MICROSCOPY; SURFACE POTENTIAL MEASUREMENT;

SEMICONDUCTOR METAL BOUNDARIES;

EID: 0031233330     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/8/3A/006     Document Type: Article

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