Computer-controlled preparation of thin tungsten layers

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 397, Issue 1, 1997, Pages 55-58

  Folger, Helmut ^a   Hartmann, Willi ^a   Klemm, Josef ^a   Lommel, Bettina ^a   Thalheimer, Werner ^a  

^a GSI HELMHOLTZZENTRUM FÜR SCHWERIONENFORSCHUNG GMBH   (Germany)

Author keywords

Self supported foils; Thin films; Tungsten

Indexed keywords

COMPUTER CONTROL; COPPER; ELECTRON GUNS; EVAPORATION; FILM PREPARATION; ION SOURCES; METAL FOIL; METALLIC FILMS; THIN FILMS; TUNGSTEN; VACUUM APPLICATIONS; VAPOR DEPOSITION;

HEAVY ION TARGETS; HIGH VACUUM EVAPORATION DEPOSITION PROCESS;

TARGETS;

EID: 0031233246     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(97)00370-7     Document Type: Article

References (1)

1. R. Kirchner, K.H. Burkhard, W. Hüller, O. Klepper, Nucl. Instr. and Meth. 186 (1981) 295.