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Surface and Coatings Technology

Volumn 93, Issue 2-3, 1997, Pages 234-237

Ion energy distribution in plasma immersion ion implantation

(4) Mandl S a Brutscher, J a Gunzel R a Moller W a

a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

Energy distribution; PIII; Plasma model; Plasma sheath

Indexed keywords

ION BEAMS; MATHEMATICAL MODELS; PLASMA SHEATHS; PULSE GENERATORS; VACUUM;

FARADAY CUP; ION ENERGY DISTRIBUTION; PLASMA IMMERSION ION IMPLANTATION (PIII);

ION IMPLANTATION;

EID: 0031223734 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00051-0 Document Type: Article

Times cited : (8)

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