Thermal decomposition analysis of spin-coated films of partly protected polyvinylphenol with the t-butoxycarbonyl group using time-resolved IR

Applied Spectroscopy

Volumn 51, Issue 9, 1997, Pages 1352-1354

  Tanimura, Sachiko ^a   Kumada, Teruhiko ^a   Ueyama, Akemi ^a   Kobayashi, Junji ^a   Kuramoto, Kazuo ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Photo resist; Spin coated film; Thermal decomposition; Time resolved IR spectroscopy

Indexed keywords

FILMS; ORGANIC POLYMERS; PHOTORESISTS; PYROLYSIS; THERMAL EFFECTS;

POLYVINYLPHENOL; SPIN-COATED FILM;

INFRARED SPECTROSCOPY;

EID: 0031223706     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702971942033     Document Type: Article

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