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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 9 SUPPL. B, 1997, Pages 5854-5859

Dielectric properties of electron-cyclotron-resonance-sputtered (Ba, Sr)TiO3 films

(3) Ohfuji, Shin Ichi a Itsumi, Manabu a Akiya, Hideo a

a NTT CORPORATION (Japan)

Author keywords

(Ba, Sr)TiO3; Dielectrics; ECR sputtering; Hysteresis; Thin film

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; ELECTRIC FIELD EFFECTS; ELECTRON CYCLOTRON RESONANCE; HYSTERESIS; LEAKAGE CURRENTS; PERMITTIVITY; POLARIZATION; SPUTTER DEPOSITION; STRESS CONCENTRATION; THIN FILMS;

BARIUM STRONTIUM TITANATE; ELECTRON CYCLOTRON RESONANCE (ECR) SPUTTERING;

DIELECTRIC FILMS;

EID: 0031223594 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.36.5854 Document Type: Article

Times cited : (10)

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