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Volumn 40, Issue 5, 1997, Pages 35-44

On Generic Vibration Criteria for Advanced Technology Facilities: With a Tutorial on Vibration Data Representation

Author keywords

Displacement response; Floor motion criteria; Microscope criteria; Structural dynamics; Total dynamic system; Velocity response; Vibration; Vibration analysis

Indexed keywords

DYNAMIC RESPONSE; FLOORS; MICROSCOPES; SIGNAL PROCESSING; STRUCTURAL ANALYSIS; VIBRATIONS (MECHANICAL);

EID: 0031223464     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (82)

References (24)
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  • 6
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    • (1963) Random Vibration , vol.2
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  • 8
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    • (1994) Acoustical Terminology
  • 9
    • 0009092553 scopus 로고
    • Low-Frequency Noise and Vibration from Trains
    • Ch. 16, P.M. Nelson (Ed.), London: Butterworth & Co. (Publishers) Ltd.
    • Remington, P.J., Kurzweil, L.G., and Towers, D.A., "Low-Frequency Noise and Vibration from Trains." Ch. 16, in Transportation Noise Reference Book, P.M. Nelson (Ed.), London: Butterworth & Co. (Publishers) Ltd. (1987).
    • (1987) Transportation Noise Reference Book
    • Remington, P.J.1    Kurzweil, L.G.2    Towers, D.A.3
  • 11
    • 0346506248 scopus 로고
    • Rational Vibration and Structural Dynamics Evaluations for Advanced Technology Facilities
    • September/October
    • Medearis, K., "Rational Vibration and Structural Dynamics Evaluations for Advanced Technology Facilities," Journal of the Institute of Environmental Sciences (September/October, 1995).
    • (1995) Journal of the Institute of Environmental Sciences
    • Medearis, K.1
  • 12
    • 0242618347 scopus 로고
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    • Institute of Environmental Sciences and Technology, "Considerations in Cleanroom Design," IES-RP-CC012.1 (1993).
    • (1993) Considerations in Cleanroom Design
  • 14
    • 0020747921 scopus 로고
    • Vibration Challenges in Microelectronics Manufacturing
    • May
    • Ungar, E.E., and Gordon, C.G., "Vibration Challenges in Microelectronics Manufacturing," Shock and Vibration Bulletin, 53(I):51-58 (May, 1983).
    • (1983) Shock and Vibration Bulletin , vol.53 , Issue.1 , pp. 51-58
    • Ungar, E.E.1    Gordon, C.G.2
  • 15
    • 0020949340 scopus 로고
    • Vibration Criteria for Microelectronics Manufacturing Equipment
    • July
    • Gordon, C.G., and Ungar, E.E., "Vibration Criteria for Microelectronics Manufacturing Equipment," Proceedings of Inter-Noise 83, pp. 487-490 (July, 1983).
    • (1983) Proceedings of Inter-Noise , vol.83 , pp. 487-490
    • Gordon, C.G.1    Ungar, E.E.2
  • 16
    • 0347136660 scopus 로고    scopus 로고
    • Vibration Prediction and Control in Microelectronics Facilities
    • July
    • Gordon, C.G., "Vibration Prediction and Control in Microelectronics Facilities," Proceedings of Inter-Noise 96, pp. 149-154 (July, 1996).
    • (1996) Proceedings of Inter-Noise , vol.96 , pp. 149-154
    • Gordon, C.G.1
  • 17
    • 0025455656 scopus 로고
    • Vibration Control Design of High Technology Facilities
    • July
    • Ungar, E.E., Sturz, D.H., and Amick, C.H., "Vibration Control Design of High Technology Facilities." Sound and Vibration, V. 24. No. 7, pp. 20-27 (July, 1990).
    • (1990) Sound and Vibration , vol.24 , Issue.7 , pp. 20-27
    • Ungar, E.E.1    Sturz, D.H.2    Amick, C.H.3
  • 19
    • 0003864602 scopus 로고    scopus 로고
    • Upper Saddle River, New Jersey, Prentice-Hall
    • Dowding, C.H., Construction Vibrations, Upper Saddle River, New Jersey, Prentice-Hall (1996).
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    • Dowding, C.H.1
  • 20
    • 0022329130 scopus 로고
    • Designing Sensitive Equipment and Facilities
    • December
    • Ungar, E.E., "Designing Sensitive Equipment and Facilities," Mechanical Engineering, V. 107, No. 12, pp. 47-51 (December, 1985).
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    • Ungar, E.E.1
  • 22
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    • Specifying and Interpreting a Site Vibration Evaluation
    • October
    • Amick, H., and Gordon, C.G., "Specifying and Interpreting a Site Vibration Evaluation," Microcontamination, V. 7, No. 10, pp. 42-52 (October, 1989).
    • (1989) Microcontamination , vol.7 , Issue.10 , pp. 42-52
    • Amick, H.1    Gordon, C.G.2
  • 23
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    • Vibration and Noise Control in State-of-the-Art Clean Rooms
    • December
    • Gordon, C.G., and Amick, H., "Vibration and Noise Control in State-of-the-Art Clean Rooms," Proceedings of Microcontamination 89 (December, 1989).
    • (1989) Proceedings of Microcontamination , vol.89
    • Gordon, C.G.1    Amick, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.