Electrostatic excitation of tuning fork shaped angular rate sensors

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 200-203

  Söderkvist, Jan ^a  

^a Colibri Pro Development AB ^*  (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; ELECTRIC EXCITATION; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES;

TUNING FORK SHAPED ANGULAR RATE SENSORS;

SENSORS;

EID: 0031223154     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/032     Document Type: Article

References (8)

1. Söderkvist J 1994 Micromachined gyroscopes Sens. Actuators A 43 65-71
2. Frere PEM and Craddock R W 19xx Angular rate sensor and method of production thereof European Patent Application 0 574 143
3. Bernstein J, Cho S, King A T, Kourepenis A, Maciel P and Weinberg M 1993 A micromachined comb-drive tuning fork rate gyroscope Proc. MEMS '93 pp 143-8
4. Baker G N 1992 Quartz rate sensor from innovation to application Proc. Symp. Gyro Technology (Stuttgart) 1992 pp 11.1-20
5. Söderkvist J 1993 A sensor element intended for a gyro US Patent 5,251,483,
6. Tanaka K, Mochida Y, Sugimoto S, Moriya K, Hasegawa T, Atsuchi K and Ohwada K 1995 A micromachined vibrating gyroscope Sens. Actuators A 50 111-5
7. Greek S, Ericsson F, Johansson S and J-A Schweitz 1995 In situ tensile strength measurement of thick-film and thin-film micromachined structures Proc. Transducers '95 vol 2 pp 56-9
8. Burstein A and Kaiser W J 1995 The microelectromechanical gyroscope-analysis and simulation using SPICE electronic simulator Proc. SPIE Micromachining and Microfabrication 2642 225-32