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Volumn 29, Issue 6, 1997, Pages 327-331
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TDI imaging and scanning moiré for online defect detection
a a a b |
Author keywords
Dynamic imaging; Machine vision; Moir ; Optical inspection; Profilometry; TDI
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Indexed keywords
CAMERAS;
CHARGE COUPLED DEVICES;
COMPUTER VISION;
LIGHTING;
MOIRE FRINGES;
OPTICAL SENSORS;
SCANNING;
SEMICONDUCTOR LASERS;
DYNAMIC IMAGING;
ONLINE DEFECT DETECTION;
OPTICAL INSPECTION;
PROFILOMETRY;
TIME DELAY AND INTEGRATION IMAGING;
IMAGING TECHNIQUES;
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EID: 0031222953
PISSN: 00303992
EISSN: None
Source Type: Journal
DOI: 10.1016/S0030-3992(97)00032-7 Document Type: Article |
Times cited : (9)
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References (10)
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