Study of solid surfaces by metastable electron emission microscopy: Energy-filtered images and local electron spectra at the outermost surface layer of silicon oxide on Si(100)

Journal of Applied Physics

Volumn 82, Issue 6, 1997, Pages 2954-2960

  Yamamoto, Susumu ^a   Masuda, Shigeru ^a   Yasufuku, Hideyuki ^b   Ueno, Nobuo ^b   Harada, Yoshiya ^b   Ichinokawa, Takeo ^c   Kato, Makoto ^d   Sakai, Yuji ^d  

^a UNIVERSITY OF TOKYO   (Japan)

^b CHIBA UNIVERSITY   (Japan)

^c WASEDA UNIVERSITY   (Japan)

^d JEOL LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON EMISSION; ELECTRON ENERGY LEVELS; MOLECULAR ORIENTATION; MONOLAYERS; OXIDES; SILICON WAFERS; SURFACES;

LOW ENERGY ELECTRON MICROSCOPY; METASTABLE ELECTRON EMISSION MICROSCOPY; MOLECULAR DIFFUSION;

ELECTRON MICROSCOPY;

EID: 0031222367     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366130     Document Type: Article

References (20)

1. O. H. Griffith and W. Engel, Ultramicroscopy 36, 1 (1991).
2. M. Mundschau, Ultramicroscopy 36, 29 (1991).
3. O. H. Griffith, P. A. Habliston, and G. B. Birrell, Ultramicroscopy 36, 262 (1991).
4. G. F. Remfer and O. H. Griffith, Ultramicroscopy 47, 35 (1992).
5. E. Bauer, Surf. Sci. 299/300, 102 (1994).
6. Y. Harada, S. Yamamoto, M. Aoki, S. Masuda, T. Ichinokawa, M. Kato, and Y. Sakai, Nature (London) 372, 657 (1994).
7. Y. Sakai, M. Kato, S. Masuda, Y. Harada, and T. Ichinokawa, Surf. Sci. 336, 295 (1995).
8. H. D. Hagstrum, Phys. Rev. Lett. 43, 1050 (1979).
9. H. D. Hagstrum, in Chemistry and Physics of Solid Surfaces VII, edited by R. Vanselow and R. Home (Springer, Berlin, 1988), pp. 341-366.
10. Y. Harada and H. Ozaki, Jpn. J. Appl. Phys. 2 26, 1201 (1987).
11. Y. Harada, S. Masuda, and H. Ozaki, Chem. Rev. (in press).
12. E. L. Leasure, C. R. Mueller, and T. Y. Riley, Rev. Sci. Instrum. 46, 635 (1975).
13. D. W. Fahey, W. F. Parks, and L. D. Shearer, J. Phys. E. (Sci. Instrum.) 13, 381 (1980).
14. H. Hotop, E. Kolb, and J. Lorenzen, J. Electron Spectrosc. Relat. Phenom. 16, 213 (1979).
15. H. Ishii, S. Masuda, and Y. Harada, Surf. Sci. 239, 222 (1990).
16. M. Kato and K. Tsuno, Nucl. Instrum. Methods Phys. Res. A 298, 296 (1990).
17. S. Masuda, H. Ishii, and Y. Harada, Surf. Sci. 242, 400 (1991).
18. F. Bart, M. Gautier, F. Jollet, and J. P. Duraud, Surf. Sci. 306, 342 (1994).
19. P. Poveda and A. Glachant, Surf. Sci. 323, 258 (1995).
20. A. Koma and R. Ludeke, Surf. Sci. 55, 735 (1976).