The effects of La and Nb modification on fatigue and retention properties of Pb(Ti, Zr)O3 thin-film capacitors

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 9 A/B, 1997, Pages

  Aoki, Katsuhiro ^a   Fukuda, Yukio ^a  

^a Texas Instruments Japan Ltd   (Japan)

Author keywords

Fatigue; La; Nb; PZT; Retention; Thin film capacitor

Indexed keywords

CHEMICAL MODIFICATION; COMPOSITION EFFECTS; CRYSTAL MICROSTRUCTURE; ELECTRODES; FATIGUE OF MATERIALS; LANTHANUM; NIOBIUM; POLARIZATION; REMANENCE; SEMICONDUCTING LEAD COMPOUNDS; SOL-GELS; THIN FILM DEVICES;

LEAD ZIRCONATE TITANATE; RETENTION PROPERTIES;

CAPACITORS;

EID: 0031222085     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l1195     Document Type: Article

References (4)

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3. G. H. Haertling and C. E. Land: J. Am. Ceram. Soc. 54 (1971) 1.
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