A novel micromechanical flow controller

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 165-169

  Van Toor, M W ^a   Lammerink, T S J ^a   Gardeniers, J G E ^a   Elwenspoek, M ^a   Monsma, D ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL FLOW; FLOW CONTROL; FLUIDICS;

MICROMECHANICAL FLOW CONTROLLERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031221974     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/023     Document Type: Article

References (7)

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2. Fluitman J H J, van den Berg A and Lammerink T S J 1994 Micro Total Analysis Systems ed A van der Berg and P Bergveld (Dordrecht: Kluwer) p 73
3. Lammerink T S J, Spiering V L, Elwenspoek M, Fluitman J H J and van den Berg A 1996 Modular concept for fluid handling systems Proc. Microelectromechanical Systems (MEMS), San Diego 1996 pp 389-94
4. Breedveld P C, Breunese A P J and Broenink J F et al Modelvorming en simulatie Lecture notes course 'Modelling and Simulation' 1993/1994 (University of Twente, Enschede, the Netherlands)
5. Shah R K 1978 Laminar Flow Forced Convection in Ducts (New York: Academic)
6. van Toor M W 1995 Design and realization of a manually adjustable, implantable valve for use in a glaucoma filter implant RTD Thesis MESA Research Institute, University of Twente, The Netherlands
7. Jansen H V, Gardeniers J G E, Elders J, Tilmans H A C and Elwenspoek M 1994 Applications of fluorocarbon polymers in micromechanics and micromachining Sens. Actuators A 41-42 136-40