Microstructure and preferred orientation of BaTiO3 thin films on Pt/Ti/SiO2/substrates prepared by ultrasonic spraying deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 9 SUPPL. B, 1997, Pages 5840-5845

  Kim, In Tae ^a   Chung, Su Jin ^a   Park, Soon Ja ^a  

^a Seoul National University   (South Korea)

Author keywords

BaTiO3 thin film; Microstructure; Preferred orientation; Pt Ti SiO2 Si substrate; Ultrasonic spraying deposition

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; DEPOSITION; GRAIN GROWTH; NUCLEATION; PLATINUM; SILICA; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; TITANIUM; ULTRASONIC APPLICATIONS;

ULTRASONIC SPRAYING DEPOSITION;

BARIUM TITANATE;

EID: 0031221044     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5840     Document Type: Article

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