Key steps to the integrated circuit

Bell Labs Technical Journal

Volumn 2, Issue 4, 1997, Pages 15-28

  Mark Melliar Smith, C ^a   Haggan, Douglas E ^a   Troutman, William W ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; ELECTRONICS PACKAGING; EPITAXIAL GROWTH; MASKS; MOS DEVICES; PATENTS AND INVENTIONS; PHOTOLITHOGRAPHY; RELIABILITY; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; TECHNOLOGICAL FORECASTING; TRANSISTORS;

ALPHA PARTICLE PROBLEMS; PLANAR PROCESSES;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0031220731     PISSN: 10897089     EISSN: None     Source Type: Journal    
DOI: 10.1002/bltj.2081     Document Type: Article

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