Study on a micro piezoelectric linear actuator with friction drive method - Force characteristics of grip type linear actuator

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 63, Issue 9, 1997, Pages 1246-1250

  Sakano, Tetsuro ^a   Terashima, Hiroya ^a   Hayano, Koji ^a  

^a NONE

Author keywords

Friction drive; Micro linear actuator; Multilayer piezoelectric device

Indexed keywords

FINITE ELEMENT METHOD; LINEAR CONTROL SYSTEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; POSITION CONTROL;

FRICTION DRIVE METHOD; MICRO PIEZOELECTRIC LINEAR ACTUATOR;

ACTUATORS;

EID: 0031220075     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.63.1246     Document Type: Article

References (7)

1. M.Kurosawa, K.Nishita and Y.Koike: Hybrid Transducer Ultrasonic Linear Motor Using Flexural Vibrator, Proc. 11th Symp. Ultrasonic Electronics, Kyoto 1990, Jpn. J. Appl. Phys., 30, (1991) Suppl. 30-1.
2. Burleigh Instrument Inc. Catalog.