Reactive ion etching of ion-plated carbon films

Vacuum

Volumn 48, Issue 7-9, 1997, Pages 681-684

  Popova, K ^a  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; MASKS; PHOTORESISTS; REACTIVE ION ETCHING; SPUTTER DEPOSITION;

ION PLATED CARBON FILMS;

DIELECTRIC FILMS;

EID: 0031220060     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(97)00068-7     Document Type: Article

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