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Volumn 242, Issue 1-2, 1997, Pages 161-165
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Deep level defects in n- and p-type Fe implanted InP
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Author keywords
Deep levels; Defects; Indium phosphide; Semiconductor
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Indexed keywords
ACTIVATION ENERGY;
CAPACITANCE;
CRYSTAL DEFECTS;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
ELECTROSTATICS;
ION IMPLANTATION;
IRON;
SEMICONDUCTOR DOPING;
TIN;
TRANSIENTS;
CARRIER TRAPS;
COULOMBIC REPULSION;
DEEL LEVEL DEFECTS;
SEMICONDUCTING INDIUM PHOSPHIDE;
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EID: 0031212497
PISSN: 03784371
EISSN: None
Source Type: Journal
DOI: 10.1016/S0378-4371(97)00201-X Document Type: Article |
Times cited : (2)
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References (14)
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