X-ray photoelectron spectroscopy study of the interactions of O+ and N+ ions with polyimide films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 8, 1997, Pages 5268-5274

  Zhang, Lulu ^a   Yasui, Toshiaki ^a   Tahara, Hirokazu ^a   Yoshikawa, Takao ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Chemical structural change; In situ; Ion bombardment; Polyimide film; X ray photoelectron spectroscopy (XPS)

Indexed keywords

CHEMICAL STRUCTURES;

DESORPTION; ION BEAMS; ION BOMBARDMENT; NITROGEN; OXYGEN; PLASMAS; POLYIMIDES; RADIATION EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASTIC FILMS;

EID: 0031212313     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5268     Document Type: Article

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