Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection

Applied Optics

Volumn 36, Issue 22, 1997, Pages 5717-5727

  Miller, J Michael ^a   de Beaucoudrey, Nicole ^a   Chavel, Pierre ^a   Turunen, Jari ^a   Cambril, Edmond ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; ERRORS; FABRICATION; INTEGRATED OPTOELECTRONICS; NUMERICAL ANALYSIS; OPTICAL DESIGN; OPTICAL INTERCONNECTS; OPTIMIZATION; REACTIVE ION ETCHING;

BINARY SLANTED SURFACE RELIEF GRATINGS; GRATING COUPLERS; PLANAR OPTICS; SUBWAVELENGTH GRATINGS;

INTEGRATED OPTICS;

EID: 0031211351     PISSN: 00036935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (29)