-
2
-
-
0016994110
-
Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. UltraViolet Spectrum
-
E. O. Degenkolb, C. J. Mogab, M. R. Goldrick, J. E. Griffiths. "Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. UltraViolet Spectrum," Applied Spectroscopy, 30(5), 520-527 (1976).
-
(1976)
Applied Spectroscopy
, vol.30
, Issue.5
, pp. 520-527
-
-
Degenkolb, E.O.1
Mogab, C.J.2
Goldrick, M.R.3
Griffiths, J.E.4
-
3
-
-
0016903682
-
Plasma Etching in Integrated Circuit Manufacture - A Review
-
R. G. Poulson, "Plasma Etching in Integrated Circuit Manufacture - A Review," J. Vac. Sci. Technol., 14(1), 266-274 (1977).
-
(1977)
J. Vac. Sci. Technol.
, vol.14
, Issue.1
, pp. 266-274
-
-
Poulson, R.G.1
-
5
-
-
0019692066
-
Tunnel Magnetron Characteristics and Discharge Diagnostics
-
L. Holland, "Tunnel Magnetron Characteristics and Discharge Diagnostics," Thin Solid Films. 86, 227-239 (1981).
-
(1981)
Thin Solid Films
, vol.86
, pp. 227-239
-
-
Holland, L.1
-
6
-
-
0026138445
-
In Situ Monitoring of Etching Uniformity in Plasma Reactors
-
D. Economou, E. S. Aydil, G. Barna, "In Situ Monitoring of Etching Uniformity in Plasma Reactors," Solid State Technol., 34(4), 107-111 (1991).
-
(1991)
Solid State Technol.
, vol.34
, Issue.4
, pp. 107-111
-
-
Economou, D.1
Aydil, E.S.2
Barna, G.3
-
7
-
-
5844398948
-
Optical Diagnostic Instrument for Monitoring Etch Uniformity during Plasma Etching of Polysilicon in a Chlorine-Helium Plasma
-
June
-
W. A. Hareland, R. J. Buss, "Optical Diagnostic Instrument for Monitoring Etch Uniformity During Plasma Etching of Polysilicon in a Chlorine-Helium Plasma," Sandia Report SAND93-0455, June 1993.
-
(1993)
Sandia Report SAND93-0455
-
-
Hareland, W.A.1
Buss, R.J.2
-
8
-
-
0025417102
-
Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF4/O2 Etching of Silicon
-
M. Dalvie and K. F. Jensen. "Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF4/O2 Etching of Silicon," J. Electrochem. Soc. 137(4), 1062-1078 (1990).
-
(1990)
J. Electrochem. Soc.
, vol.137
, Issue.4
, pp. 1062-1078
-
-
Dalvie, M.1
Jensen, K.F.2
-
9
-
-
0020782345
-
Asymmetric Abel Inversions on Inductively Coupled Plasma Spatial Emission Profiles Collected from a Photodiode Array
-
M. W. Blades, "Asymmetric Abel Inversions on Inductively Coupled Plasma Spatial Emission Profiles Collected from a Photodiode Array," Applied Spectroscopy 37(4), 371-375 (1983).
-
(1983)
Applied Spectroscopy
, vol.37
, Issue.4
, pp. 371-375
-
-
Blades, M.W.1
-
10
-
-
0027558560
-
Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon
-
S. Djurovic, J. R. Roberts, M. A. Sobolewski, J. K. Olthoff, "Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon," J. Res. N. I. S. T., 98, 59-80 (1993).
-
(1993)
J. Res. N. I. S. T.
, vol.98
, pp. 59-80
-
-
Djurovic, S.1
Roberts, J.R.2
Sobolewski, M.A.3
Olthoff, J.K.4
-
11
-
-
0030213521
-
Remote Spectral Imaging System (RSIS) Based on an Acousto-Optic Tunable Filter (AOTF)
-
F. Moreau, D. M. Hueber, T. Vo-Dinh, "Remote Spectral Imaging System (RSIS) Based on an Acousto-Optic Tunable Filter (AOTF)," Instrum. Sci. & Technol., 24(3), 179-193 (1996).
-
(1996)
Instrum. Sci. & Technol.
, vol.24
, Issue.3
, pp. 179-193
-
-
Moreau, F.1
Hueber, D.M.2
Vo-Dinh, T.3
-
12
-
-
84975655441
-
Simple Compact Monochromatic Imaging System for Plasma Diagnostics
-
R. L. Williamson, W. A. Hareland, H. C. Peebles, "Simple Compact Monochromatic Imaging System for Plasma Diagnostics," Applied Spectroscopy, 28(12), 2201-2203 (1989).
-
(1989)
Applied Spectroscopy
, vol.28
, Issue.12
, pp. 2201-2203
-
-
Williamson, R.L.1
Hareland, W.A.2
Peebles, H.C.3
-
13
-
-
0000613804
-
Inversion of Abel's Integral Equation - Application to Plasma Spectroscopy
-
C. Fleurier, J. Chapelle, "Inversion of Abel's Integral Equation - Application to Plasma Spectroscopy," Computer Phys. Commun., 7, 200-206 (1974).
-
(1974)
Computer Phys. Commun.
, vol.7
, pp. 200-206
-
-
Fleurier, C.1
Chapelle, J.2
-
14
-
-
5844398947
-
Abel: Stable, High Accuracy Program for the Inversion of Abel's Integral Equation
-
I. Beniaminy, M. Deutsch, "Abel: Stable, High Accuracy Program for the Inversion of Abel's Integral Equation," Computer Phys. Commun., 27, 415-422 (1982).
-
(1982)
Computer Phys. Commun.
, vol.27
, pp. 415-422
-
-
Beniaminy, I.1
Deutsch, M.2
-
16
-
-
0003527573
-
-
IFI/Plenum, New York, Washington
-
A. R. Striganov, N. S. Sventitskii, Tables of Spectral Lines of Neutral and Ionized Atoms, IFI/Plenum, New York, Washington, 1968.
-
(1968)
Tables of Spectral Lines of Neutral and Ionized Atoms
-
-
Striganov, A.R.1
Sventitskii, N.S.2
|