Fabrication of the first transistors on 300 mm wafers

Semiconductor International

Volumn 20, Issue 9, 1997, Pages

  Haris, Clint ^a   Hiatt, Mark ^a   Mastroianni, Sal ^a   Mautz, Karl ^a   Pitts, Bobby ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES; TRANSISTORS;

WAFER SIZE;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031210005     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)