Simulation of monolithic silicon LLL scanning X-ray interferometer

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 8, 1997, Pages 5356-5360

  Bertolotto Bianc, Giuseppe ^a,c   Mana, Giovanni ^b   Zosi, Gianfranco ^a,b  

^a UNIVERSITY OF TURIN   (Italy)

^b Istituto di Metrologia Gustavo Colonnetti   (Italy)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Avogadro constant; Lattice plane spacing; Nanotechnology; X ray interferometer

Indexed keywords

AVOGADRO'S CONSTANT; LATTICE PLANE SPACING; X RAY INTERFEROMETERS;

CRYSTAL LATTICES; MATHEMATICAL MODELS; NANOTECHNOLOGY; SILICON; TRANSDUCERS;

INTERFEROMETERS;

EID: 0031209906     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5356     Document Type: Article

References (16)

1. U. Bonse and W. Graeff: X-ray Optics, ed. H. J. Queisser (Springer, Berlin, 1977) Topics in Applied Physics, Vol. 33, p. 83.
2. R. D. Deslattes: Appl.Phys. Lett. 15 (1969) 386.
3. P. Becker, K. Dorenwendt, G. Ebeling, R. Lauer, W. Lucas, R. Probst, H.-J. Rademacher, G.Reim, P. Seyfried and H. Siegert: Phys. Rev. Lett. 46 (1981) 1540.
4. G. Basile, A. Bergamin, G. Cavagnero, G. Mana and G. Zosi: IEEE Trans. Instrum. Meas. 38 (1989) 210.
5. H. Fujimoto, K. Nakayama, M. Tanaka and G. Misawa: Jpn. J. Appl. Phys. 34 (1995) 5065.
6. A. Bergamin, G. Cavagnero, L. Cordiali, G. Mana and G. Zosi: to be published in IEEE Trans. Instrum. Meas.
7. M. Hart: J. Phys. D 1 (1968) 1405.
8. D. K. Bowen, D. G. Chetwynd and D. R. Schwarzenberger: Meas. Sci. Technol. 1 (1990) 107.
9. U. Kuetgens, P. Becker, G. Bertolotto Bianc, V. Jaeger, J. Stümpel and G. Zosi: Proc. 3rd Int. Conf. Ultra Precision Manufacturing/beh Engineering, Aachen, 1994, eds. M. Weck and H. Kunzmann (Rhiem, Duisburg, 1994) p. 118.
10. G. Basile, P. Becker, A. Bergamin, G. Cavagnero, A. Franks, K. Jackson, U. Kuetgens, G. Mana, E. W. Palmer, M. Stedman, J. Stümpel and G. Zosi: Proc. 7th Int. Precision Engineering Seminar, Kobe, 1993, eds. N. Ikawa, S. Shimada and R. Spragg (Butterworth-Heinemann, Stoneham, 1994) p. 248.
11. L. Lindgren and M. Perryman: Proc. RGO-ESA Workshop on Future Possibilities for Astrometry in Space, Cambridge, UK, 19-21 June 1995), ESA SP-379.
12. Solvia System 92.0, distributed by Solvia Eng. AB, Våsterås, Sweden.
13. G. Basile, A. Bergamin, G. Cavagnero and G. Mana: Metrologia 28 (1991) 455.
14. M. Alemanni, G. Mana, F. Pedrotti and G. Zosi: Metrologia 22 (1986) 55.
15. G. Mana, F. Vattaneo and G. Zosi: Metrologia 26 (1989) 219.
16. P. Becker and J. Stümpel: Metrologia 27 (1990) 127.