Damage production in silicon by MeV Si cluster irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 129, Issue 3, 1997, Pages 392-396

  Shen, Dingyu ^a   Lu, Xiting ^a   Xia, Zhonghuang ^a   Wang, Xuemei ^a   Zhao, Qiang ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; HIGH ENERGY PHYSICS; ION BOMBARDMENT; PARTICLE ACCELERATORS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON;

DAMAGE PRODUCTION; DEFECT SELF ANNEALING;

RADIATION DAMAGE;

EID: 0031209345     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00311-X     Document Type: Article

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