A two-dimensional capacitive position transducer with rotation output

Review of Scientific Instruments

Volumn 68, Issue 8, 1997, Pages 3238-3240

  Barker, M J ^a   Colclough, M S ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; ACOUSTIC NOISE MEASUREMENT; APPROXIMATION THEORY; CALCULATIONS; DETECTORS; ELECTRODES; LITHOGRAPHY;

CAPACITIVE POSITION TRANSDUCER; ROTATION OUTPUT; SYNTHETIC DUAL FULL BRIDGE TECHNIQUE;

TRANSDUCERS;

EID: 0031206850     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148273     Document Type: Article

References (8)

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3. R. D. Peters, Rev. Sci. Instrum. 64, 2250 (1993).
4. R. D. Peters, Rev. Sci. Instrum. 64, 2256 (1993).
5. M. H. W. Bonse, F. Zhu, and J. W. Spronck, Sens. Actuators A 41, 29 (1994).
6. M. H. W. Bonse, F. Zhu, and H. F. van Beek, Meas. Sci. Technol. 4, 801 (1993).
7. M. J. Barker and M. S. Colclough (unpublished).
8. W. H. Press, B. P. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes, the Art of Scientific Computing (Cambridge University Press, Cambridge, 1989).