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The polarization of the polarizer at 193.3 nm was estimated by the following approaches: (a) our previous study on HF (Ref. 13)
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The polarization of the polarizer at 193.3 nm was estimated by the following approaches: (a) our previous study on HF (Ref. 13);
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polarization measurement at 266 nm (polarized output from a Nd:YAG laser) and extrapolation to 193.3 nm
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