Characterization of magnetron-sputtered chromium and iron nitride films

Surface and Coatings Technology

Volumn 93, Issue 1, 1997, Pages 32-36

  Kacsich, T ^a   Niederdrenk, M ^a   Schaaf, P ^a   Lieb, K P ^a   Geyer, U ^a   Schulte, O ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Chromium nitride film; Iron; Magnetron

Indexed keywords

CHROMIUM COMPOUNDS; IRON COMPOUNDS; MAGNETRON SPUTTERING; MORPHOLOGY; MOSSBAUER SPECTROSCOPY; NITRIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING TUNNELING MICROSCOPY; SILICON; SPUTTER DEPOSITION; STOICHIOMETRY; X RAY DIFFRACTION ANALYSIS;

CHROMIUM NITRIDE; CONVERSION ELECTRON MOESSBAUER SPECTROSCOPY; IRON NITRIDE; REACTIVE MAGNETRON SPUTTERING; RESONANT NUCLEAR REACTION ANALYSIS;

PROTECTIVE COATINGS;

ANALYSIS; CHROMIUM; COATING; CORROSION RESISTANCE; IRON;

EID: 0031202621     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00035-2     Document Type: Article

References (18)

1. T. Kacsich, M. Neubauer, U. Geyer, K. Baumann, F. Rose, M. Uhrmacher, J. Phys. D: Appl. Phys. 28 (1995) 424.
2. M. Uhrmacher, K. Pampus, F.J. Bergmeister, D. Purschke, K.P. Lieb, Nucl. Instr. Methods, B 9 (1985) 234.
3. T. Osipowicz, K.P. Lieb, S. Brüssermann, Nucl. Instr. Methods, B 18 (1987) 232.
4. P. Schaaf, T. Wenzel, K. Schemmerling, K.P. Lieb, Hyp. Int. 92 (1994) 1189.
5. H.P. Klug and L.E. Alexander, X-Ray Diffraction Procedures, Wiley, New York, 1954.
6. L.R. Doolittle, Nucl. Instr. Methods, B 9 (1985) 344.
7. M. Borowski, C. Illgner and T. Kacsich, unpublished.
8. H. Hollek, Binäre and ternäre Carbid und Nitridsysteme der Übergangsmetalle, Gebrüder Bornträger, Stuttgart, 1984.
9. S.J. Bull, D.S. Rickerby, Surf. Coat. Technol 43/44 (1990) 732.
10. J.A. Thornton, D.W. Hofmann, Thin Solid Films 171 (1989) 5.
11. VDI, VDI-Lexikon Werkstofftechnik, VDI Verlag, Düsseldorf, 1990.
12. P. Schaaf, C. Illgner, M. Niederdrenk, K.P. Lieb, Hyp. Int. 95 (1995) 199.
13. H.A. Wriedt, N.A. Gokcen, R.H. Nafziger, Bull. of Alloy Phase Diagrams 8 (1987) 355.
14. M. Mekata, H. Yoshimura, H. Takaki, J. Phys. Soc. Japan 33 (1972) 63.
15. N. DeChristofaro, R. Kaplow, Metall Trans. 8A (1977) 425.
16. K.H. Jack, Acta. Cryst. 5 (1952) 404.
17. T. Kacsich, K.P. Lieb, A. Schaper, O. Schulte, J. Phys.: Condens. Matter. 8 (1996) 10703.
18. M. Niederdrenk, P. Schaaf, K.P. Lieb, O. Schulte, J. All. Comp. 237 (1996) 81.