New machining concept for manufacturing microstructures with excimer lasers

Machining Science and Technology

Volumn 1, Issue 1, 1997, Pages 153-162

  Tonshoff H K ^a   Overmeyer, L ^a   Ostendorf, Andreas ^a   Hesener, Hanno ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; ETCHING; EXCIMER LASERS; GRINDING WHEELS; LASER PULSES; MANUFACTURE; MICROSTRUCTURE;

ETCH TECHNOLOGY; MASK PROJECTION; MICROCOMPONENTS; MICROGEAR WHEELS; MICROLENSES; REMOVAL VOLUME;

MACHINING;

EID: 0031199688     PISSN: 10910344     EISSN: None     Source Type: Journal    
DOI: 10.1080/10940349708945642     Document Type: Article

References (11)

1. U. Rebhan, H. Endert, and G. Zaal, "Micromanufacturing Benefits from Excimer Laser Development," Laser Focus World, (1994) 91-96.
2. M. Geiger, N. Lutz, T. Rebhan, and M. Goller, "Influence of Process and Material Parameters on Ablation Phenomena and Mechanical Properties of Ceramics and Composites for Excimer Laser Treatment," Laser Treatment of Materials, (1992) 577-584.
3. B. Dance, "Novel Excimer Laser System Marks Wires On-the-Fly," Laser Magazine, 1 (1991) 31-33.
4. E. Harvey, M. C. Gower, and P. T. Rumsby, "Excimer Laser Projector for Materials Processing Applications," Int. Conf. on Laser Advanced Materials Processing (LAMP'92), Nagaoka City, Japan (1992).
5. H. K. Tönshoff and J. Mommsen, "Process of Generating 3D-Microstructures with Excimer Lasers," NATO ASI, 265 (1994) 221-236.
6. H. K. Tönshoff, D. Hesse, J. Mommsen, and H. Kappel, "Excimer Laser Systems," Proceedings LANE 94, Erlangen, Germany (1994).
7. H. K. Tönshoff and R. Kader, "Programming for Laser Beam Cutting," Blech, Rohre, Profile, 40(4) (1993) 317-322.
8. L. Overmeyer and J. Mommsen, "Fertigungsverfahren für die Mikrooptik und Mikrosensorik," Jahrbuch für Optik und Feinmechanik (1995) 118-127.
9. 2-Lasers," Applied Surface Science, 46 (1990).
10. J. Jahns, "Integrated Microoptics for Computing and Switching Applications," SPIE 1544 (1991) 246-262.
11. H. K. Tönshoff, D. Hesse, and J. Mommsen, "Micromachining Using Excimer Lasers," Annals of the CIRP, 42 (1993) 246-251.