-
1
-
-
0003852994
-
-
Plenum, New York
-
W.M. Moreau, Semiconductor Lithography: Principles, Practices, and Materials, Plenum, New York, 1988.
-
(1988)
Semiconductor Lithography: Principles, Practices, and Materials
-
-
Moreau, W.M.1
-
3
-
-
4244067118
-
-
H.A. v.d. Vegt, H.M. v. Pinxteren, M. Lohmeir, E. Vlieg, J.M.C. Thornton, Phys. Rev. Lett. 68 (1992) 3335.
-
(1992)
Phys. Rev. Lett.
, vol.68
, pp. 3335
-
-
Vegt, H.A.V.D.1
Pinxteren, H.M.V.2
Lohmeir, M.3
Vlieg, E.4
Thornton, J.M.C.5
-
4
-
-
3342882885
-
-
G. Rosenfeld, R. Servaty, C. Teichert, B. Poelsema, G. Comsa, Phys. Rev. Lett. 71 (1993) 895.
-
(1993)
Phys. Rev. Lett.
, vol.71
, pp. 895
-
-
Rosenfeld, G.1
Servaty, R.2
Teichert, C.3
Poelsema, B.4
Comsa, G.5
-
5
-
-
0347691909
-
-
J. Vrijmoeth, H.A. v.d. Vegt, J.A. Meyer, E. Vlieg, R.J. Behm, Phys. Rev. Lett. 72 (1994) 3843.
-
(1994)
Phys. Rev. Lett.
, vol.72
, pp. 3843
-
-
Vrijmoeth, J.1
Vegt, H.A.V.D.2
Meyer, J.A.3
Vlieg, E.4
Behm, R.J.5
-
7
-
-
3342950532
-
-
S. Esch, M. Hohage, T. Michely, G. Comsa, Phys. Rev. Lett. 72 (1994) 518.
-
(1994)
Phys. Rev. Lett.
, vol.72
, pp. 518
-
-
Esch, S.1
Hohage, M.2
Michely, T.3
Comsa, G.4
-
10
-
-
77952196233
-
-
R.Q. Hwang, C. Günther, J. Schröder, S. Günther, E. Kopatzki, R.J. Behm, J. Vac. Sci. Technol. A 10 (1992) 1970.
-
(1992)
J. Vac. Sci. Technol. A
, vol.10
, pp. 1970
-
-
Hwang, R.Q.1
Günther, C.2
Schröder, J.3
Günther, S.4
Kopatzki, E.5
Behm, R.J.6
-
12
-
-
0030231916
-
-
M. Kuhn, A. Bzowski, T.K. Sham, J.A. Rodriguez, J. Hrbek, Thin Solid Films 283 (1996) 209.
-
(1996)
Thin Solid Films
, vol.283
, pp. 209
-
-
Kuhn, M.1
Bzowski, A.2
Sham, T.K.3
Rodriguez, J.A.4
Hrbek, J.5
-
17
-
-
0030083562
-
-
T. Müller, D. Heuer, H. Pfnür, U. Kohler, Surf. Sci. 347 (1996) 80.
-
(1996)
Surf. Sci.
, vol.347
, pp. 80
-
-
Müller, T.1
Heuer, D.2
Pfnür, H.3
Kohler, U.4
-
18
-
-
84914632921
-
-
J.W. Niemantsverdriet, P. Dolle, K. Markert, K. Wandelt, J. Vac. Sci. Technol. A 5 (1987) 875.
-
(1987)
J. Vac. Sci. Technol. A
, vol.5
, pp. 875
-
-
Niemantsverdriet, J.W.1
Dolle, P.2
Markert, K.3
Wandelt, K.4
-
19
-
-
0013175920
-
-
C. Günther, S. Günther, E. Kopatzki, R.Q. Hwang, J. Schröder, J. Vrijmoeth, R.J. Behm, Ber. Bunsenges. Phys. Chem. 97 (1993) 522.
-
(1993)
Ber. Bunsenges. Phys. Chem.
, vol.97
, pp. 522
-
-
Günther, C.1
Günther, S.2
Kopatzki, E.3
Hwang, R.Q.4
Schröder, J.5
Vrijmoeth, J.6
Behm, R.J.7
-
21
-
-
4043180426
-
-
R.Q. Hwang, J. Schröder, C. Günther, R.J. Behm, Phys. Rev. Lett. 67 (1991) 3279.
-
(1991)
Phys. Rev. Lett.
, vol.67
, pp. 3279
-
-
Hwang, R.Q.1
Schröder, J.2
Günther, C.3
Behm, R.J.4
-
28
-
-
0001494530
-
-
S. Liu, L. Bönig, J. Detch, H. Metiu, Phys. Rev. Lett. 74 (1995) 4495.
-
(1995)
Phys. Rev. Lett.
, vol.74
, pp. 4495
-
-
Liu, S.1
Bönig, L.2
Detch, J.3
Metiu, H.4
-
29
-
-
0026898721
-
-
J. Schröder, C. Günther, R.Q. Hwang, R.J. Behm, Ultramicroscopy 42-44 (1992) 475.
-
(1992)
Ultramicroscopy
, vol.42-44
, pp. 475
-
-
Schröder, J.1
Günther, C.2
Hwang, R.Q.3
Behm, R.J.4
-
30
-
-
0011168752
-
-
J.C. Dunphy, C. Chapelier, D.F. Ogletree, M.B. Salmeron, J. Vac. Sci. Technol. B 12 (1994) 1742.
-
(1994)
J. Vac. Sci. Technol. B
, vol.12
, pp. 1742
-
-
Dunphy, J.C.1
Chapelier, C.2
Ogletree, D.F.3
Salmeron, M.B.4
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