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Volumn 306, Issue 1, 1997, Pages 174-177
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Mechanical stress in amorphous Ge-As-S(Se) film/Si substrate system
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Author keywords
Amorphous materials; Annealing; Stress
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Indexed keywords
HETEROJUNCTIONS;
SEMICONDUCTING FILMS;
SEMICONDUCTING GERMANIUM COMPOUNDS;
SEMICONDUCTING SELENIUM COMPOUNDS;
STRESSES;
NEWTON RINGS METHOD;
AMORPHOUS FILMS;
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EID: 0031198273
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)00226-5 Document Type: Article |
Times cited : (5)
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References (18)
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