Measurement of the interfacial mechanical properties of a thin ceramic coating on ductile substrates

Thin Solid Films

Volumn 306, Issue 1, 1997, Pages 124-129

  Shieu, F S ^a   Shiao, M H ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Chemical vapour deposition (CVD); Copper; Gold; Silicon oxide

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COPPER; GOLD; INTERFACES (MATERIALS); SHEAR STRENGTH; SILICA; TENSILE TESTING;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CERAMIC COATINGS;

EID: 0031198011     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00259-9     Document Type: Article

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